汇报题目：参加SPIE International Symposium on Optifab 2017 参会报告

汇报时间：2017年10月26日(星期四) 10:00

汇报地点：兴庆校区精密所东311

汇 报 人：张楚鹏

会议名称：SPIE International Symposium on Optifab 2017

会议时间：16–19 October, 2017

会议地点：Rochester Riverside Convention Center in Rochester, New York, American

会议简介：

SPIE is the international society for optics and photonics, an educational not-for-profit organization founded in 1955 to advance light-based science and technology. Optifab, organized jointly by SPIE and APOMA, is the largest optical manufacturing conference and exhibition held in the United States. With a unique technical focus on classical and advanced optical manufacturing technologies, Optifab offers conference attendees an exceptional opportunity to interact with worldwide experts in the field of optical fabrication. We invite you to actively participate in the technical program by joining us for Optifab 2017.

会议交流工作

Poster presentation: Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation

报告人：张楚鹏

参加论文信息

Title: Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation

Author: Chupeng Zhang, Huiying Zhao, Xueliang Zhu, Shijie Zhao and Chunye Jiang

Abstract:

The chemical mechanical polishing (CMP) is a key process during the machining route of plane optics. To improve the polishing efficiency and accuracy, a new CMP model and machine tool were developed. Based on the Preston equation and the axial run-out error measurement results of the m circles on the tin plate, a CMP model that could simulate the material removal at any point on the workpiece was presented. An analysis of the model indicated that lower axial run-out error led lower material removal but better polishing efficiency and accuracy. Based on this conlusion, the new CMP machine was designed, and the ultra-precision gas hydrostatic guideway and rotary table as well as the Siemens 840Dsl numerical control system were incorporated in the new CMP machine. To verify the design principles of new machine, a series of detection and machining experiments were conducted. The LK-G5000 laser sensor was employed for detecting the straightness error of the gas hydrostatic guideway and the axial run-out error of the gas hydrostatic rotary table. A 300-mm-diameter optic was chosen for the surface profile machining experiments performed to determine the CMP efficiency and accuracy.

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