1 汇报安排

题 目：参加ISMTII 2015国际会议总结报告会

时 间：2015年10月28日（周三）下午20：00–22:00

地 点：西二楼 精密所会议室

报 告 人：

博1319班 胡英杰 学号:：4113001072 指导教师：赵立波 副教授

博1116 班 许 煜 学号：4111001091 指导教师：蒋庄德 教授

博1528班 徐廷中 学号：4111001112 指导教师：蒋庄德 教授

指导教师：蒋庄德 教授

2 参加国际会议信息

会议名称：ISMTII 2015

会议日期：22-25 September, 2015

会议地点：Taipei, Taiwan

会议简介：For more than 20 years, the International Symposium on Measurement Technology and Intelligent Instruments (ISMTII) has established itself as a well renowned and prestigious event for international measurement experts. With expected more than 300 participants from research institutes, universities and industrial sectors, the 12th ISMTII 2015 will focus on presenting scientific and engineering breakthroughs to develop the cutting edges in modern measurement technologies and intelligent instruments. The Symposium offers the precious opportunity to exchange the state-of-the-art and communications in the fields between experts and students. Meanwhile, the exhibition and industrial forum are held to demonstrate the latest measurement technologies and instruments around the world.

3 参会论文信息

Title：A MEMS Density and Viscosity Resonant Sensor Based on Torsional Vibrating Mode

Author：Yingjie Hu, Libo Zhao, Tongdong Wang, Yulong Zhao, Guoying Yuan, Liwei Lin and Zhuangde Jiang

Abstract—This study put forward a method to calculate fluid viscosity and density separately using resonance principle, and fluid-solid coupling simulations for three micro-cantilevers with different shape were completed. The chip structures were designed according to the results of simulation and the MEMS (Micro Electromechanical Systems) sensor was fabricated finally. The experimental measurements of fluid viscosity and density were carried out using flexural and torsional resonant modes of micro-cantilever under two temperature points in eight different fluids. Experimental results showed that the shape and modal of micro-cantilever had no significant impacts on measuring precision of fluid density, and fluid density only changed resonant frequency of the mcro-cantilevers, which was consistent with theory. But the measuring accuracy of fluid viscosity using torsional resonant mode was much higher than that using flexural resonant mode due to different quality factors.

Title：A piezoresistive accelerometer with axially stressed self-supporting sensing beams

Author：YuXu, Libo Zhao, Zhuangde Jiang, Tingzhong Xu, Wendi Gao and Yulong Zhao

Abstract—For improving the sensitivity and the natural frequency, our approach focused on a new geometry as a self-supporting sensing element structure is implemented in this paper. A novel piezoresistive accelerometer with axially stressed sensing beams was presented. An analytical model based on Euler-Bernoulli beam theory was deduced in the case of the pure axial stress of the sensing beam. The theoretical formulas were presented for calculating the axial stress and the natural frequency. For verifying the theoretic formulas by finite element model, the condition of achieving pure axial stress was discussed. Meanwhile, the uniformity of the stress along the sensing beam and the cross sensitivity were taken into considered. The results showed “self-supported sensing element” structure with axially stressed sensing beams contribute to the improvement. In conclusion

Title：Novel diaphragm structure combined peninsula-island for ultra-low pressure sensor with high sensitivity

Author：Libo Zhao, Tingzhong Xu, Yu Xu, Xin Guo, Hongyan Wang, Yulong Zhao, Liwei Lin and Zhuangde Jiang

Abstract—An ultra-sensitive Micro Electromechanical Systems (MEMS) piezoresistive pressure sensor and its optimization theory were presented for ultra-low pressure measurement. The pressure sensor was designed with working range of 0-500 Pa and had a high sensitivity of 25 mV/V/500 Pa. The large sensitivity was obtained due to novel diaphragm combined peninsula-island structures. These structures made stress gradient along the boundary of stress concentration region (SCR) change sharply which enabled little energy to be wasted outside SCR. And also the trade-off between high-sensitivity and linearity was avoided. In comparison to a flat diaphragm with the same sizes, the proposed sensor structure could achieve high sensitivities, fine nonlinearities without deteriorating resonance frequency.

欢迎有兴趣的同学届时参加。