博士生齐静雅参加国际会议回国报告公告

汇报题目：SPIE Photonics Europe 2018 参会报告

汇报时间：2018年5月7日(星期一)  9：00

汇报地点：科技园西五楼北A328会议室

汇报人：齐静雅

会议名称：SPIE Photonics Europe 2018

会议时间：22-26 April 2018

会议地点：Palais de la Musique et des Congrès, Strasbourg, France

会议简介：SPIE is an international society advancing an interdisciplinary approach to the science and application of light. It serves as an advocate and liaison to political and industry associations within the European optics and photonics community, and sponsors and organizes world-class technical events throughout Europe. The international society for optics and photonics provides a unique opportunity for researchers from a variety of fields to exchange ideas and techniques, and fosters discussion on fundamental aspects of laser-matter interaction and the state-of-the-art in laser materials processing among pure scientists, end users and laser manufacturers. We expect that the participation would play an important role not only for understanding fundamental knowledge of laser precision microfabrication but also forecasting future technologies to be developed and the future laser market.

会议交流工作

报告人：齐静雅

参加论文信息

Presentation Type: Oral

Title: Laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulators

Author: Jingya Qi, Zhao Wang, Junhui Huang, Jianmin Gao

Abstract: The linear translation stages play an important role in computer numerical control machine tools, coordinate measuring machines and semiconductor lithograph equipment. Six geometric motion errors are associated with a precision linear stage. High precision simultaneous measurement of multiple degrees of freedom is essential for the multiple-dimension motion calibration of the ultra-precision linear translation stage. In this paper, a laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulator is proposed. In this optical configuration, a stabilize single-frequency laser (f0) and two acousto-optic modulators are used to generate the laser source. The frequency shifts of the two AOMs are f1 and f2, respectively. The positive first order diffraction beams of two AOMs, f0+f1 and f0+f2, are merged into one orthogonally and linearly polarized beam with a frequency offset of (f1-f2) as the laser source for the roll measurement-unit. A half wave plate (HWP) is utilized as the roll sensing plate to magnify the tiny roll angle into an observable phase shift based on the change of polarization state. The resolution of the roll measurement system is determined by the amplification factor which can be enhanced by a multi-reflection cavity made of a specifically arranged assembly square pyramidal mirror and a folding mirror. The zeroth beam f0 and the positive first order beam f0+f1 provided by two AOMs forms two space separated beams for the displacement measurement, which can eliminate the periodic nonlinearity error. The optical system of the simultaneous measurement of displacement and roll angle were setup. The experimental results showed good repeatability and good consistency.