汇报题目：参加SPIE OPTIFAB 2019参会报告

汇报时间：2019年10月22日(星期二) 19:30

汇报地点：科技园西五楼北A304会议室

汇报人：廖恺

会议名称：SPIE OPTIFAB 2019

会议时间：14-17 October 2019

会议地点：Rochester Riverside Convention Center Rochester, New York, United States

会议简介：SPIE is the international society for optics and photonics founded in 1955 to advance light-based technologies. Serving approximately 180,000 constituents from more than 170 countries, the Society advances emerging technologies through interdisciplinary information exchange, continuing education, publications, patent precedent, and career and professional growth.

Optifab, organized jointly by SPIE and APOMA, is the largest optical manufacturing conference and exhibition held in North America. This is the premier event to meet with top companies and learn about the latest optical fabrication technologies.

会议交流工作

Poster presentation: Experimental investigation on processing of fused silica microchannels by high repetition rate femtosecond laser

报告人：廖恺

参加论文信息

Title:Experimental investigation on processing of fused silica microchannels by high repetition rate femtosecond laser

KaiLiao, Wenjun Wang,Xuesong Mei, Bin Liu, Aifei Pan

Abstract: Femtosecond laser processing has been extensively used in micromachining, especially for the precision processing of hard and brittle materials. However, the precision of the materials ablated by femtosecond laser is not easy to control. This paper reports an experimental and theoretical study on the ablation characteristics of fused silica using high repetition rate femtosecond laser. An experimental study of microchannels milling on the fused silica was carried out. The influence of pulse energy, repetition rate, scanning velocity, scanning times on the size and morphology of the microchannels was obtained. Simultaneously, the experimental data on the depth and width of microchannels under different parameter combinations were acquired through the orthogonal experiment. The prediction model of aspect ratio was obtained by BP neural network algorithm. Finally, the verification test was established and showed that the experimental results were consistent with the theoretical results. It would provide a theoretical basis for further study on the microchannels fabrication of femtosecond laser.