汇报题目:参加International Optics and Photonics Conference国际会议回国报告
汇报时间:2019年12月20日(星期五)9:30
汇报地点:交大曲江校区 西五楼 A228会议室
汇报人:赵卓
会议名称:International Optics and Photonics Conference-2019
会议时间:2019年12月9日至10日
会议地点:Heathrow, London, UK
会议简介:OLCOPC(International Optics and Photonics Conference-2019)该会议是一场关于光学与成像领域的科学盛会。它为科研人员、科学家、博士、教授、领域关键决策者、行业专家等相通物理行业领域人士提供了一种快捷高效的讨论合作平台,并分享前沿研究工作。解决研究过程中遇到的相关行业难题。为yl23455永利认定高水平国际会议。
参会论文信息:
Title: Accurate Localization Method for Subaperture Stitching Interferometry in Aspherical Optics Metrology
Author: Zhuo Zhao, Bing Li, Xiaoqin Kang, Jiasheng Lu, Tongkun Liu
Abstract:
Aspherical optics have a superior performance in many applications. However, precision metrology for aspherical surface is a key stage in its manufacture. Subaperture stitching interferometry (SSI) is one of the mainstream testing methods for aspherical metrology. In many cases, the annular stitching (ASSI) is more suitable for rotational symmetry components because less motion directions need to adjust. Though motion only along optical axis need to be adjusted, inaccurate localization for subapertures may also happened due to these factors: A greater machining error in center area of optics; inappropriate zero position (Cat eye) selection in interferometry. This phenomenon will leads to a greater error in measurement result. To overcome this problem, an accurate localization method is proposed for subapertures stitching along optical axis. It is based on the maximum asphericity information between reference spherical wavefront and test aspherical surface. Firstly, by using test aspherical formula and theoretical spherical wavefront, we can calculate minimum peak-to-valley (PV) value of maximum asphericity. Theoretical location of optimal reference sphere which corresponding to this value can be obtained. Then, perform practical test which start at the original zero position and find actual minimum PV value near its theoretical location. Difference between theoretical location and actual one is the compensate quantity. Finally, execute ASSI measurement to aspherical optics. Location coordinate of each subaperture is compensated with acquired quantity. Through the experiments, it can be concluded that the proposed method can improves measurement accuracy of ASSI. The results produced by new method is more desirable than that of convention one.